HBO Microlithography Lamps for ASML i-line Systems
Areas of application
- Microlithography
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Information about Family
HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.
Products
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Data sheet | ||
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HBO 1003 W/PIL
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1003 W | 27.1 V | 85.0 mm | 195.0 mm | ||
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HBO 1500 W/PIL
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1500 W | 23.0 V | 118.0 mm | 273.0 mm | ||
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HBO 2100 W/PIL
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2100 W | 24.0 V | 118.0 mm | 240.0 mm | ||
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HBO 2500 W/PIL
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2500 W | 28.0 V | 149.0 mm | 340.0 mm | ||
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HBO 3500 W/PIL
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3500 W | 23.0 V | 154.0 mm | 360.0 mm | ||
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HBO 5500 W/PIL
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5500 W | 27.0 V | 154.0 mm | 325.5 mm | ||
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HBO 5510 W/PIHL
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5500 W | 29.0 V | 154.0 mm | 352.5 mm |